Sürdürülebilir Kalkınma Amaçları
Yazarlar
- Baltaci, Cemalettin(27)
- Uzun, Sevda(27)
- Yildiz, Salih(25)
- Kulakaç, Nurşen(24)
- Ayaydin, Hasan(22)
- Yilmaz, Ozgur(20)
- Bostan, Sedat(19)
- Doğan, Kadir Caner(19)
- Kenek, Gökhan(19)
- Tosunoğlu, Büşra(19)
- Akyol, Hikmet(18)
- Akyürek, Suat(18)
- Can, İbrahim(18)
- Doğru, Bülent(18)
- Hayaloğlu, Pınar(18)
- Keyifli, Nazlı(18)
- Peker, İskender(18)
- Sipahi, Ferkan(18)
- Çalışır, Gülsüm(18)
- Avcı, İbrahim(17)
- Gücer, Mehmet Ali(17)
- Pala, Fahrettin(17)
- Türkkan, Tuğba(17)
- Ulutaşdemir, Nilgün(17)
- Yildiz, Emel(17)
- Akyüz, Ahmet Mutlu(16)
- Cengiz, Ekrem(16)
- Demirağ, Hatice(16)
- Hintistan, Sevilay(16)
- Yeşilçayır, Celal(16)
- Akaryali, Enver(15)
- Kaygusuz, Abdullah(15)
- Merdan, Mehmet(15)
- Bayrakdaroğlu, Serdar(14)
- Demirbağ, Orkun(14)
- Evren, Savaş(14)
- Kahraman, Yakup(14)
- Yesilelebi, Gl(14)
- Yıldız, Barış(14)
- Ödemiş, Murat(14)
Yayınlar
- MakaleYalnız künye2016Türkiye'de parasal aktarım mekanizması kanallarının işleyişine ilişkin ampirik bulgular: (1998-2015)
Polat, Melike Atay; Özkök, Canan Sancar; Uğur, Ahmet
Parasal aktarım mekanizması, para politikası kararlarının ekonominin reel ve parasal değişkenleri üzerindeki etkilerinin hangi kanallar üzerinden hangi gecikme ile gerçekleştiğini ifade etmektedir. Bu çalışmada Türkiye'de para politikası ile reel ekonomi etkileşiminin hangi parasal aktarım mekanizması kanalı veya kanalları aracılığıyla gerçekleştiği tespit edilmeye çalışılmıştır. Analizde kullanılan değişkenler ve bu değişkenlerin sıralaması iktisat teorisi dikkate alınarak ele alınmıştır. Bu amaçla, 1998:Q1-2015Q1 dönemi verileri kullanılarak M1 para arzı, faiz oranı, döviz kuru, hisse senedi fiyatları, banka kredilerinin kısa dönemde sanayi üretimi ve enflasyon üzerinde etkili olup olmadığı analiz edilmiştir. Bundan hareketle çalışmada ilk önce değişkenlere ait verilerin durağanlığı Genişletilmiş Dickey-Fuller (ADF) testi ile sınanmıştır. ADF testi sonuçlarına göre, değişkenlerin birinci farkları I(1) alındığında durağanlaştıkları tespit edilmiştir. İkinci aşamada ise, VAR metodundan yararlanılarak etki-tepki analizi yapılmıştır. Çalışmanın VAR analizi sonuçlarına göre, para arzı, faiz oranı, döviz kuru, hisse senedi fiyatları ve banka kredileri sanayi üretim endeksi ve enflasyon üzerinde etkilidir. Bu nedenle de Türkiye'de 1998:Q1-2015:Q1 parasal aktarım mekanizmasının tüm kanallarının kısa dönemde işlediği sonucuna ulaşılmıştır
AtıfTR Dizin1
İncele - MakaleYalnız künye2016Sustainability Organic Agriculture and Livestock Production with Respect to European Union in Eastern Anatolia and East Black Sea Regions
Altun, Hilal Ürüşan; Haşimoğlu, Sümer; Aksakal, Vecihi; Cengiz, Mahir Murat; Erdoğan, Yaşar; Bayram, Bahri; Dellal, Gürsel
The majority of farm households in Turkey and especially the Eastern Anatoliaare still based on low-input semi subsistence agriculture and livestock production. Despite a slow decline in recent years, agriculture and livestock production remains a major employer in Turkey and it is a significant contributor to the country's gross domestic product, GDP. Whist Turkey is one of the EU candidate countries, is self sufficient in food production and Turkish agriculture is poorly structured inefficient, with farming in the Eastern Anatoliabeingmainlysubsistencefarming. Yet,thesetraditionalruralstructures combined with poor access to low level of education and low level of off-farm unemployment problem makes the situation more complicated and unsustainable. The best way to promote sustainability, better and higher production of Eastern Anatolian and rural Turkey is to invest in the local people, villages through improved, continuing and effective agricultural and livestock programs in particular.Investment in human capital especiallyintheruralareasleadstomoreemploymentopportunitiesthrough entrepreneurship and innovation in organic agriculture and livestock production. A holistic approach to developing and improving supply chains could unlock the potential forsophisticated,state-of-the-artorganicagricultureandlivestockproducersand businesses in the region to become EU and global players. Eastern Anatolian livestock producers and the farmers have the ambitions to take part in future progress because the region is naturally organic not by design but default.It is for sure that present potential of the region has not been fully determined and utilized. EU has greatly benefited from previous enlargements economically, politically and socially. When European Union (EU) and Turkish Government relations considered and accession of Turkey to EU would be the logical consequence of the previous accessions. The screening on chapter 11 (Agriculture and rural development) is one of the important criteria and Turkey is working on to meet these benchmarks.
AtıfTR Dizin2İncele - MakaleYalnız künye2016Orman Amenajman Planlarının Konumsal Simülasyon Modeli İle Hazırlanması
Kadıoğulları, Ali İhsan; Bingöl, Özkan; Keleş, Sedat; Baskent, Emin Zeki
Bu makalede, ekosistem tabanlı çok amaçlı planlama anlayışına göre geliştirilmiş bir simülasyon tabanlı konumsal orman amenajmanı planlama modeli tanıtılmıştır. Öncelikle modelin genel mimari çatısı kısaca açıklanmıştır. Model daha sonra örnek bir orman planlama biriminde uygulanmıştır. Bu amaçla konumsal özellikleri dikkate almayan bir temel simülasyon senaryosu ile farklı konumsal özelliklerin yer aldığı üç farklı planlama senaryosu olmak üzere toplamda dört tane planlama senaryosu üretilmiştir. Bu planlama senaryoları değişik performans göstergeleri (eta, dikili servet, net karbon birikimi, simülasyon süresi sonundaki yaş sınıfı dağılımı) kapsamında karşılaştırılmıştır. Planlama senaryolarının karşılaştırılması sonucunda, konumsal olmayan planlama senaryosu ile konumsal planlama senaryoları arasında eta açısından büyük farklılıkların olmadığı saptanmıştır. Ancak, konumsal planlama senaryoları ile birlikte orman ekosisteminde konumsal düzenlemenin etkin bir şekilde yapıldığı ve daha uygulanabilir orman amenajman planlarının üretilebileceği belirlenmiştir
- MakaleYalnız künye2016Interpolation Method Used To Determine The Height Of Geoid, Application Of The Trabzon City Data, Turkey
Karaaslan, Özge; Kayıkçı, Emine Tanır; Aşık, Yusuf
Finding the spatial extent of known height used in engineering works quite time-consuming process that requires a difficult and cost. But the less time it takes the ellipsoid heights transformation into orthometric height with GNSS measurements available and easier. It also has a certain precision and sensitivity for the conversion geoid height values must be known. This practice in Trabzon Land Registry IX. Regional Directorate of cadastral works in east-west direction of 80 km, measured orthometric and ellipsoidal heights in the 600 C3 point values created in an area 30 km long north-south direction is used. the point ITRF96 (International Terrestrial Reference Frame-International Terrestrial Reference Network) datums based on 3-dimensional Cartesian coordinates and Gauss Krüger projection coordinates are known. The study is divided into two basis points according to the method and test points. Fulcrums x and y axis directions and the distribution of points is chosen uniformly reflected by the orthometric height. In this study, the polynomial interpolation surfaces, interpolation with multiquadratic surfaces with interpolation surface obtained by the method of weighted average method is used. in selected mainstay, known aware of the ellipsoidal and the orthometric height using the calculated geoid height, calculated orthometric heights for the test points with different interpolation methods, at this point in the known calculating the difference from the known height has made comparisons between the interpolation method
AtıfTR Dizin2İncele - MakaleYalnız künye2016Conformable Fractional Chebyshev Equations and Fractional Chebyshev Polynomials
Gökdoğan, Ahmet; Ünal, Emrah
In this work, we give the fractional power series solutions around = 0 -ordinary point of conformable fractional first and second kind Chebyshev differential equations. We present first and second kind fractional Chebyshev polynomials using by these solutions. Finally, we present certain property of fractional first and second kind Chebyshev polynomials.
- MakaleYalnız künye2016Disease and Death in the Modern Culture: On Now and Eternity
Demir, Sertac Timur
This paper is basically about nowism as a representation of modernity rather than a temporal fragment, about cancer as philosophical reference rather than as a biological illness, and about death as constructive value rather than as a destructive experience. All these representation-loaded concepts are dealt with through the story of Tessa, the protagonist in the film Now is Good (2012). In the liquid modernity, on the one hand nowist orientations, tendencies and acts are wryly reduced to a cliche: Carpe diem (seize the day) and on the other hand temporal uncertainty of death implies the essential principle of memento mori (remember you will die) or Mutu qabla an tamutu (die before you die). The now is, as a worldview beyond a temporality, not merely good, but perhaps the God of the modern society. However, deadly cancer, which is an uninvited guest, nullifies this modern doctrine that commercializes the now as eternity and immortality itself. Cancer that marks death and the sense of chaos what cancer stirs are antithesis and perhaps antidote of the liquid modernity. This paper, for the very reason, unexpectedly affirms death while criticising the nowist culture.
AtıfWoS2TR Dizin2
İncele - MakaleYalnız künye2016The Concept of mas'ala in Islamic Jursiprudence
Yilmaz, Fetullah
The subject of this article is the concept of mas'ala (issue) in Islamic jurisprudence in terms of the logic of pre-modern science. Within this framework, formal structure and content of mas'ala and facts in which it consists, and some related subjects are dealt with in this paper. There are initial principles must be known before starting all science. The concept mas'ala is one of these. Mas'ala, which is a conclusion sentence aimed to be reached, consists of a topic and a verb. In fiqh, the topic of mas'ala is act of responsible, while its verb is religious decision. In addition to some questions about the topic of Islamic jurisprudential concerns, there are also some problems on its verb. Concerns in fiqh are separated into sections such as relevant area, generality, characteristic, clarity and obscurity. Apart from these matters, in this article, it is touched also on some contemporary approaches on the concept mas'ala.
AtıfTR Dizin1İncele - MakaleYalnız künye2016Saccharin as Substitute Goods in Ottoman State
Damlibag, Fatih
Constantin Fahlberg invented saccharin during the end of 1870's. Saccharin was a product that it has strong sweetening power. Potential to sugar substitute and support of German government were provided to enlarge its market rapidly. But due to its chemical origin, some medical concerns were shown towards this product. Some doctors thought that usage of saccharin caused health problems. Due to these medical concerns, many European governments banned or restricted the entrance of this product to their countries. Fahlberg thought that his product did not deserve these critiques. According to him, critiques were originated from shaken interests of sugar industry. Near to 1900's, saccharin also entered Ottoman market. Similarly, it was also criticized by Ottoman doctors. In front of this situation, approach of Ottoman State towards saccharin happened within three stages. In the first stage, Ottoman officials did not foresee a risky situation for the usage of saccharin as a substitute for sugar. Because saccharin is a chemical drug for diabetes disease and sugar prices were very convenient. As to second stage, critiques to saccharin were taken into account. High sugar prices of this period were caused some probable risks of food fraud according to officials. Additionally, medical studies of the period provided more information about probable risks of saccharin. As a result of this situation, Ottoman State applied quantitative restrictions in saccharin import. In addition, the product could be only brought by pharmacists. Third period of saccharin in Ottoman State happened within compelling conditions of World War I. After extreme increases in sugar prices; there was an excessive demand for illegal usage of saccharin, because sugar almost disappeared from market. In front of this situation, official permission was given to saccharin usage with some restrictions.
AtıfTR Dizin2İncele - MakaleYalnız künye2016Scopus SJRQ2Therotical investigation of the effects of diesel fuel, biodiesel fuel and their blends on internal combsution engines
Sezer, Ismet
In this study; the effects of diesel fuel, the soybean oil methyl ester (SOME) biodiesel fuel and their blends at various percentages on the spray and combustion characteristics and engine performance and exhaust emissions of diesel engines investigated as theoretically. For this purpose, a model has been built for a direct injection diesel engine in a commercial vehicle by the Diesel-RK software program that can be used liberally on the net. The obtained values for diesel (D) and biodiesel (BD) fuels and D-BD fuel blends via the constructed model were compared. The results of the study show that BD fuel generally provides a close brake thermal efficiency values to diesel fuel. Additionally, BD fuel causes decrements in engine power and particulate matter (PM-soot) emission and increments in specific fuel consumption and nitric oxides (NOx) emission. On the other hand, D-BD fuel blends at various blend ratios have usually given the spray, combustion, performance, and emission values between those of diesel and biodiesel fuels.
AtıfWoS9OpenAlex3TR Dizin7İncele - MakaleYalnız künye2016The Relationship Between Female Labor Force Participation and Labor Productivity: Panel Data Analysis
Koyuncu, Julide Yalcinkaya; Yilmaz, Rasim; Ünver, Mustafa
We examine the relationship between various indicators of female labor force participation and labor productivity. We test the hypothesis that labor productivity boosts as the female employment increases by exploiting a panel data set including the period 1985 to 2010 and 111 countries and using three labor productivity indicators and three female labor force participation indicators. We identified a positive correlation between female labor force participation indicators and labor productivity. This finding is statistically significant and valid for three different productivity indicators and three different female labor force participation indicators. Thus, the results suggest that female labor force participation increases labor productivity, controlling for other factors that may contribute to labor productivity.
AtıfWoS1TR Dizin1İncele - MakaleYalnız künye2016The Relationship between Taxation and Democracy: Panel Causality Analysis for Developing Countries
Türedi, Salih; Topal, Mehmet Hanefi
This study analysis the relation between democracy and taxation in the context of developing countries. At the end of empirical analysis covering 60 countries by focusing on the period of 2006-2012, findings showing a two-way causality relation between taxation and democracy were reached. Accordingly, an increase in taxation level affects rule of law, organizational right, freedom of expression and belief positively in the countries analyzed. Briefly, it plays a vital role in the development of democracy by making a contribution to the enhancement of civil liberties. On the other hand, improvements in democratic rights and freedoms increase the number of citizens paying their taxes in full and on time, thus increases taxation level, by strengthening the harmony between citizens and state.
AtıfWoS1TR Dizin11İncele - MakaleAçık Erişim2016Scopus SJRQ2Diversity and ecology of benthic algae in Karagöl Lake, Karagöl-Sahara National Park (Şavşat, Artvin, Turkey)
Akar, Bülent; Şahın, Bülent
Benthic algal flora of Karagöl Lake, its seasonal variation, and the physical and chemical parameters of the water were studied between October 2008 and September 2010. The algal flora consisted of 112 taxa belonging to the divisions Charophyta (41), Chlorophyta (33), Cyanobacteria (18), Euglenozoa (17), Miozoa (2), and Ochrophyta (1). Six desmid taxa found in this research are new records for the freshwater algal flora of Turkey. The qualitative dominance of benthic taxa typical of slightly alkaline and mesotrophic ecosystems was observed. The qualitative and seasonal variations in epipelic taxa analyzed were dependent on the physicochemical characteristics of the water. Water quality was analyzed on the basis of benthic taxa, which are bioindicators. The physicochemical properties of the water are suitable for the development of a rich algal flora (especially desmids). According to the benthic algal composition and indicator species, it is estimated that Karagöl Lake has mesotrophic lake characteristics. This is the first study of benthic algal flora of Karagöl Lake and marks a significant contribution to the knowledge of Karagöl-Sahara National Park’s aquatic biodiversity.
AtıfScopus5WoS3OpenAlex3TR Dizin1
İncele - MakaleAçık Erişim2016Scopus SJRQ3Separation and preconcentration of Pb(II) and Cu(II) ions via carrier element-free coprecipitation using an acetohydrazide derivative
Tümay, Süreyya Oǧuz; Yazar, Murat; Ozdeş, Duygü; Bektaş, Hakan; Duran, Celal
A new method based on the combination of carrier element-free coprecipitation and flame atomic absorption spectrometric determination has been investigated for simultaneous separation and preconcentration of Pb(II) and Cu(II) ions in some environmental solid and liquid samples. The 2-f3-(4-methylbenzyl)-4-[2-(1H-indol-3-yl)ethyl]-5-oxo-4,5-dihydro-1H-1,2,4-triazol-1-ylg -N'-(phenylmethylene) acetohydrazide (MITA) was utilized as an organic coprecipitating agent without using a carrier element for coprecipitation of the analyte ions. The effects of experimental conditions including aqueous solution pH, MITA quantity, sample volume, standing time, and centrifugation rate and time were investigated in detail and optimized. The influences of some foreign ions were also evaluated on the quantitative recoveries of the analyte ions. The preconcentration factors were 125 for both analyte ions. The detection limits were 1.32 μgL-1 and 0.47 μg L-1 for Pb(II) and Cu(II) ions, respectively, and the relative standard deviations (RSDs) were lower than 4% for both analyte ions. After the accuracy of the method was checked, it was applied to sea and stream water as liquid samples and waste tea and tobacco as solid samples to determine the levels of Pb(II) and Cu(II) ions.
AtıfScopus2WoS2OpenAlex1İncele - MakaleAçık Erişim2016Scopus SJRQ3Mediostoma izmirica sp. nov.: A new harvestman species (Arachnida, Opiliones, Nemastomatidae) from Turkey
Snegovaya, Nataly Yu.; Kurt, Kemal; Yağmur, Ersen A.
A new harvestman species of the genus Mediostoma Kratochvil, 1958, Mediostoma izmirica sp. nov., is described and illustrated based on males and females from İzmir Province, Turkey. Differences between the new species and other species of the genus Mediostoma are indicated. Scanning electron microscope photographs of its characteristic structures are also given.
AtıfScopus3WoS2OpenAlex2İncele - MakaleYayıncıda açık erişim2016Scopus SJRQ1Organic geochemistry and element distribution in coals formed in eocene lagoon facies from the Eastern Black Sea Region,NE Turkey
Saydam Eker, Çiğdem; Akpinar, İbrahim; Sipahi, Ferkan
The amount and type,the inorganic element content,and the maturity of organic materials of Eocene coals,shaly coals,and coaly shales exposed in the Gümüşhane and Bayburt districts of the Eastern Black Sea Region of Turkey were investigated. The depositional environments and hydrocarbon potentials were also interpreted. The total organic carbon concentrations in the studied samples ranged from 0.50% to 63.08%. The samples from Özyurt,Kayadibi,and Tarhanas contained types II and III kerogen,and those from Sökmen and Manas contained type III kerogen. The samples contained Co,Cs,Ga,Hf,Th,U,Y,Mo,Be,Cd,Sb,and La,with average values similar to those of standard brown coals. The samples showed average contents of Co,Ga,Nb,Rb,V,Y,Cu,Pb,Zn,As,Be,and Se,similar to those of other Turkish coals. The sediment source of Eocene samples in the five areas was characterized by rocks with intermediate or mafic geochemical characteristics. The terrigenous/aquatic ratio of coal and shaly coal samples of the areas in question is >1. The sterane distribution was C29 > C28 > C27 and C29 > C27 > C28 for the Özyurt and Tarhanas areas,respectively. The average Tmax values for samples are between 424 °C and 460 °C. For samples Oz-1 and Ta-2,22S/(22S + 22R) homohopane (C32) ratios are 0.48 and 0.61,respectively; 20S/(20S + 20R) sterane (C29) ratios are 0.18 and 0.53,respectively; and Ts/(Ts + Tm) ratios are 0.015 and 0.64,respectively. The Pr/Ph ratios of the samples are >3. The studied samples have low sterane/hopane and high (C19+C20)/C23) ratios without anoxic biomarkers (17α(H)-28,30-bisnorhopane). Based on these data,the coals,shaly coals,and coaly shales were probably deposited under an oxic-suboxic mixture of marine and terrestrial environment conditions; these materials contain terrestrial organic matter and cannot generate hydrocarbon.
AtıfScopus15WoS16OpenAlex22TR Dizin4İncele - MakaleYalnız künye2015Scopus SJRQ3On- pump koroner arter baypas greftlemede miyokarde nfarktüsü ile iskemi modifiye albüminin ilişkisi
Usta, Sefer; Doğan, Orhan Veli; Doğan, Süheyla; Demirbaş, Mine; Karahan, Süleyman Caner; Kılıç, Aşkın; Menteşe, Ümit; Aykan, Ahmet Çağrı; Turan, İbrahim; Demir, Selim
Background:­ This study aims to evaluate the potential ofischemia-modified albumin (IMA) to predict the myocardialinfarction in on pump coronary artery bypass grafting(ONCABG) patients.Methods: Fifty elective isolated ONCABG patients (41 males,9 females; mean age 66 years; range 56 to 75 years) were includedin the study. Patients were divided into perioperative myocardialinfarction (PMI; n=8) and non-infarction (NPMI; n=42) groupsaccording to perioperative cardiac troponin I (cTnI) values andECG findings. Serum IMA levels were measured preoperatively,20 minutes after aortic cross clamping, 30 minutes, at 3, 6,12 and 24 hours after declamping.Results:­ Compared to the NPMI group, the declamping 30minutes, 3, 6 and 12 hours IMA levels were higher in the PMIgroup (p=0.002, p=0.048, p=0.023, p=0.007, respectively). Inboth NPMI and PMI groups, the 20 minutes after aortic crossclamping IMA levels were higher compared to the preoperativeIMA levels (p=0.0001, p=0.038, respectively).Conclusion:­ Our study results show that IMA may be anearly marker of myocardial infarction in the ONCABGpatients.
AtıfTR Dizin3İncele - MakaleYalnız künye2015Çerçeveleme teorisi ve toplumsal hareketler
Güran, Mehmet Salih
Toplumsal gerçekliğin inşasında yapı taşları olarak kullanılan iletişim çerçeveleri,bu süreç içinde kendilerine etkin roller biçen toplumsal gruplar ve toplumsal hareketler içinanlaşılması ve denetlenmesi şart olan dinamiklerin odağında yer almaktadır. Toplu eylemçerçevelerinin, kendilerini ortaya çıkaran kültürel faktörlerle birlikte ve özellikleriyle tanınması,bunların üretilip yayılıma sokulmasında etkin olan süreçlerin tanınması ve bu süreçlerintoplumsal hareketin diğer süreçleriyle etkileşimleri, toplumbilim ve siyaset bilim açısındanönemli süreçleri oluşturmaktadır. Bu nedenle çerçeveleme analizi, sosyoloji, sosyal psikoloji,siyaset bilim ve medya araştırmalarında toplumsal hareketleri ve sivil toplum kuruluşlarını daiçeren organizasyonların etkinliklerini inceleyen araştırmalar için de stratejik bir ittifak temelioluşturmaktadır. Bu araştırmanın amacı, çerçeveleme araştırmalarının toplumsal hareketleralanında hem uygulayıcılara (yani kanaat önderlerine) medya aracılığıyla iletişim sürecindesağlayabileceği denetleme imkânlarına, hem de toplumsal hareketleri odağına alan araştırmalarasunduğu analiz imkânlarına dikkati çekmektir.
AtıfTR Dizin7İncele - MakaleYalnız künye2015Anaakım Türk medyasının başarısızlığı: Türk gazetelerinin internet versiyonlarının bir çerçeveleme karşılaştırması
Güran, Mehmet Salih; Özarslan, Hüseyin
The objective of this study is to define the notion of mainstream/professional journalism bycomparatively exploring the historical conditions of media systems development to contrast itwith the infrastructure of political culture and professional culture of the past century inTurkey. After this theoretical background, we implemented a comparative framing analysis ofan actual policy debate in the Turkish press to conclude on the changing and not changingconditions that prevail in the politics/media system and culture. In the light of the framinganalysis, we found that the current state of the Turkish media system constitutes still a mostlydysfunctional social interaction platform that is caught between media parallelism andtabloidization and represents a largely underdeveloped professionalism that is still insufficientfor the deve lopment of a civil society. Nonetheless, we found on the other hand that thefundamental values and notion of mainstream media is still represented to make hope for afuture development towards a functioning media system.
AtıfTR Dizin1İncele - MakaleYalnız künye2015Design and optimization of chemical mixing system for vacuum chambers base of simulation results
Ünker, F.; Kaplan, E.; Çuvalcı, O.
Computational fluid dynamics (CFD) is widely used in device design to determine gas flowpatterns and turbulence levels. CFD is also used to simulate particles and droplets, which aresubjected to various forces, turbulence and wall interactions. These studies can now beperformed routinely because of the availability of commercial software containing highquality turbulence and particle models. In order to understand how the gas is brought down towafer, it is necessary to have a knowledge of the gas flow behavior very early in t he designspiral of the Tantalum nitride - Atomic layer deposition ( TaN- ALD) chamber by undertakingparametric investigation of the interaction effect between gas flow and the funnel structure.This paper presents such a parametric investigation on a generic TaN- ALD chamber usingCFD. The results presented have been analyzed for a total of 11 different cases by varyingneck and nozzle angles for a process gas. The gas flow was mainly investigated for the nozzleangles of 4.5 , 9 , 12 and 20 and the film thi ckness results were compared with numericalflow patterns. CFD simulations using the turbulence model in ANSYS Fluent v.13 areundertaken. The parametric study has demonstrated that CFD is a powerful tool to study theproblem of gas flow structure interaction on funnel and is capable of providing a means ofvisualizing the path of the gas under different operating conditions .
- MakaleYalnız künye2015Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results
Kaplan, Erdar; Ünker, Faruk; Çuvalcı, Olkan
-